Brooks® Models SLA5850 ام اف سی SLA5850

توضیحات

Brooks® Models SLA5850, SLA5851, SLA5853
Mass Flow Controllers and Models SLA5860,
SLA5861, SLA5863 Mass Flow Meters

GENERAL FEATURES
• Wide FS flow range for measurement and control
of gases from <3 ccm to 2500 lpm (N2
equivalent)
• Accuracy up to 1200 lpm: ±1.0% of rate (20%-100%
FS) ±0.2% FS (below 20% FS)
1200-2500 lpm: ±1% FS including linearity.
(at calibration conditions).
• Industry leading sensor stability. Long term drift
performance of < 0.2% per year. Increased system
throughput by reducing maintenance and eliminating
periodic recipe adjustment.
• Storage of up to 10 selectable calibration curves.
Spares inventories are reduced by limiting the
number of individual MFC/M’s required, lowering
inventory holding costs.
• Elastomer downport process connection option
conforms to ANSI/ISA SP-76 standard to offer
simplified installation and maintenance in an efficient
footprint.

Control Response:
• Settling Time of less than 1 second.
(better on request).
• Soft start can be used to tailor MFC performance to
process requirements.
• Proprietary Adaptive Valve Control algorithm is
available which assures that unexpected variations in
process pressure do not cause flow to deviate from
setpoint.

Analog I/O Option:
• 15-pin D-Connector
• 0(1)-5 Volt or 0(4)-20 mA setpoint and flow signals
• Single sided 24 Volt DC power supply
(13.5-27 volts DC range).
• Separate Valve-Override signal
• Precision 5 Volt Reference Output signal
• Compatible with Brooks’ Model 0150 series
secondary electronics
• TTL (open collector) Alarm Output signal

Digital Communication Options:
• DeviceNetTM, ODVATM certified
• FOUNDATIONTM Fieldbus, H1 Certified
• HART® based RS-485 multidrop